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Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines
Research article (IET Electric Power Applications, 2021) · cited 23× · AI/ML
Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines
Summary
Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines is a scholarly article[1].
Key Facts
Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines's instance of is recorded as scholarly article[2].
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APA4ort.xyz Knowledge Graph. (2026). Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines. Retrieved May 24, 2026, from https://4ort.xyz/entity/design-parameters-of-a-reluctance-actuation-system-for-stable-operation-conditions-with-applications-of-highprecision-mo
MLA“Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/design-parameters-of-a-reluctance-actuation-system-for-stable-operation-conditions-with-applications-of-highprecision-mo.
BibTeX@misc{4ortxyz_design-parameters-of-a-reluctance-actuation-system-for-stable-operation-conditions-with-applications-of-highprecision-mo_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines}}, year = {2026}, url = {https://4ort.xyz/entity/design-parameters-of-a-reluctance-actuation-system-for-stable-operation-conditions-with-applications-of-highprecision-mo}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Design parameters of a reluctance actuation system for stable operation conditions with applications of high‐precision motions in lithography machines — https://4ort.xyz/entity/design-parameters-of-a-reluctance-actuation-system-for-stable-operation-conditions-with-applications-of-highprecision-mo (retrieved 2026-05-24)
