Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage

Research article (Microsystem Technologies, 2017) · cited 21× · AI/ML
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Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage

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Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage is a scholarly article[1].

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  • Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage. Retrieved May 24, 2026, from https://4ort.xyz/entity/design-of-a-capacitive-mems-double-beam-switch-using-dynamic-pull-in-actuation-at-very-low-voltage
MLA “Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/design-of-a-capacitive-mems-double-beam-switch-using-dynamic-pull-in-actuation-at-very-low-voltage.
BibTeX @misc{4ortxyz_design-of-a-capacitive-mems-double-beam-switch-using-dynamic-pull-in-actuation-at-very-low-voltage_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage}}, year = {2026}, url = {https://4ort.xyz/entity/design-of-a-capacitive-mems-double-beam-switch-using-dynamic-pull-in-actuation-at-very-low-voltage}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage — https://4ort.xyz/entity/design-of-a-capacitive-mems-double-beam-switch-using-dynamic-pull-in-actuation-at-very-low-voltage (retrieved 2026-05-24)

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