Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers

Research article (IEEE Transactions on Semiconductor Manufacturing, 2020) · cited 71× · AI/ML
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Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers

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Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers. Retrieved May 24, 2026, from https://4ort.xyz/entity/deep-learning-for-classification-of-the-chemical-composition-of-particle-defects-on-semiconductor-wafers
MLA “Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/deep-learning-for-classification-of-the-chemical-composition-of-particle-defects-on-semiconductor-wafers.
BibTeX @misc{4ortxyz_deep-learning-for-classification-of-the-chemical-composition-of-particle-defects-on-semiconductor-wafers_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers}}, year = {2026}, url = {https://4ort.xyz/entity/deep-learning-for-classification-of-the-chemical-composition-of-particle-defects-on-semiconductor-wafers}, note = {Accessed: 2026-05-24}}
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