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Decomposition-learning-based thick-mask model for partially coherent lithography system

Research article (Optics Express, 2023) · cited 13× · AI/ML
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Decomposition-learning-based thick-mask model for partially coherent lithography system

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Decomposition-learning-based thick-mask model for partially coherent lithography system is a scholarly article[1].

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  • Decomposition-learning-based thick-mask model for partially coherent lithography system's instance of is recorded as scholarly article[2].

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APA 4ort.xyz Knowledge Graph. (2026). Decomposition-learning-based thick-mask model for partially coherent lithography system. Retrieved May 24, 2026, from https://4ort.xyz/entity/decomposition-learning-based-thick-mask-model-for-partially-coherent-lithography-system
MLA “Decomposition-learning-based thick-mask model for partially coherent lithography system.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/decomposition-learning-based-thick-mask-model-for-partially-coherent-lithography-system.
BibTeX @misc{4ortxyz_decomposition-learning-based-thick-mask-model-for-partially-coherent-lithography-system_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Decomposition-learning-based thick-mask model for partially coherent lithography system}}, year = {2026}, url = {https://4ort.xyz/entity/decomposition-learning-based-thick-mask-model-for-partially-coherent-lithography-system}, note = {Accessed: 2026-05-24}}
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