Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication

Research article (IEEE Transactions on Automation Science and Engineering, 2019) · cited 17× · AI/ML
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Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication

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Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication. Retrieved May 24, 2026, from https://4ort.xyz/entity/compensating-misalignment-using-dynamic-random-effect-control-system-a-case-of-high-mixed-wafer-fabrication
MLA “Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/compensating-misalignment-using-dynamic-random-effect-control-system-a-case-of-high-mixed-wafer-fabrication.
BibTeX @misc{4ortxyz_compensating-misalignment-using-dynamic-random-effect-control-system-a-case-of-high-mixed-wafer-fabrication_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication}}, year = {2026}, url = {https://4ort.xyz/entity/compensating-misalignment-using-dynamic-random-effect-control-system-a-case-of-high-mixed-wafer-fabrication}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication — https://4ort.xyz/entity/compensating-misalignment-using-dynamic-random-effect-control-system-a-case-of-high-mixed-wafer-fabrication (retrieved 2026-05-24)

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