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Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application
Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2023) · cited 11× · AI/ML
Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application
Summary
Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application is a scholarly article[1].
Key Facts
Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application. Retrieved May 24, 2026, from https://4ort.xyz/entity/comparing-sputter-rates-depth-resolution-and-ion-yields-for-different-gas-cluster-ion-beams-gcib-a-practical-guide-to-ch
MLA“Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/comparing-sputter-rates-depth-resolution-and-ion-yields-for-different-gas-cluster-ion-beams-gcib-a-practical-guide-to-ch.
BibTeX@misc{4ortxyz_comparing-sputter-rates-depth-resolution-and-ion-yields-for-different-gas-cluster-ion-beams-gcib-a-practical-guide-to-ch_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application}}, year = {2026}, url = {https://4ort.xyz/entity/comparing-sputter-rates-depth-resolution-and-ion-yields-for-different-gas-cluster-ion-beams-gcib-a-practical-guide-to-ch}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Comparing sputter rates, depth resolution, and ion yields for different gas cluster ion beams (GCIB): A practical guide to choosing the best GCIB for every application — https://4ort.xyz/entity/comparing-sputter-rates-depth-resolution-and-ion-yields-for-different-gas-cluster-ion-beams-gcib-a-practical-guide-to-ch (retrieved 2026-05-24)
