Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline InxGayZnzO4Films

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Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In_xGa_yZn_zO₄Films

Summary

Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In_xGa_yZn_zO₄Films is a scholarly article^[1].

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Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In_xGa_yZn_zO₄Films's instance of is recorded as scholarly article^[2].

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Authored by 5

Chen-Yang Chung, David M. Lynch, D. G. Ast, Michael O. Thompson, Raymond G. Greene

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Chen-Yang Chung, David M. Lynch, D. G. Ast, Michael O. Thompson, Raymond G. Greene

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Direct Wikidata claims

[2] ↑ Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In_xGa_yZn_zO₄Films — instance of (P31): scholarly article. wikidata.org.

Class ancestry

[1] ↑ Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In_xGa_yZn_zO₄Films is an instance of scholarly article (scholarly article) [P31, primary]. Wikidata. wikidata.org.

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4ort.xyz Knowledge Graph. (2026). Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In<sub>x</sub>Ga<sub>y</sub>Zn<sub>z</sub>O<sub>4</sub>Films. Retrieved May 24, 2026, from https://4ort.xyz/entity/chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub

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“Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In<sub>x</sub>Ga<sub>y</sub>Zn<sub>z</sub>O<sub>4</sub>Films.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub.

BibTeX

@misc{4ortxyz_chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In<sub>x</sub>Ga<sub>y</sub>Zn<sub>z</sub>O<sub>4</sub>Films}}, year = {2026}, url = {https://4ort.xyz/entity/chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub}, note = {Accessed: 2026-05-24}}

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According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Chemical Etch Rate and X-Ray Structure of Reactive Sputtered c-Axis Aligned Crystalline In<sub>x</sub>Ga<sub>y</sub>Zn<sub>z</sub>O<sub>4</sub>Films — https://4ort.xyz/entity/chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub (retrieved 2026-05-24)

Canonical URL: https://4ort.xyz/entity/chemical-etch-rate-and-x-ray-structure-of-reactive-sputtered-c-axis-aligned-crystalline-in-sub-x-sub-ga-sub-y-sub-zn-sub · Last refreshed: May 24, 2026