Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field

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Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field

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Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field is a scholarly article[1].

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APA 4ort.xyz Knowledge Graph. (2026). Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field. Retrieved May 24, 2026, from https://4ort.xyz/entity/atomistic-mechanisms-of-cu-cmp-in-aqueous-h2o2-molecular-dynamics-simulations-using-reaxff-reactive-force-field
MLA “Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/atomistic-mechanisms-of-cu-cmp-in-aqueous-h2o2-molecular-dynamics-simulations-using-reaxff-reactive-force-field.
BibTeX @misc{4ortxyz_atomistic-mechanisms-of-cu-cmp-in-aqueous-h2o2-molecular-dynamics-simulations-using-reaxff-reactive-force-field_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Atomistic mechanisms of Cu CMP in aqueous H2O2: Molecular dynamics simulations using ReaxFF reactive force field}}, year = {2026}, url = {https://4ort.xyz/entity/atomistic-mechanisms-of-cu-cmp-in-aqueous-h2o2-molecular-dynamics-simulations-using-reaxff-reactive-force-field}, note = {Accessed: 2026-05-24}}
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