Use these citations when quoting this entity in research, articles, AI prompts, or wherever provenance matters. We aggregate Wikidata + Wikipedia + authoritative open-data sources; the stitched, scored, cross-referenced view is what 4ort.xyz contributes.
APA4ort.xyz Knowledge Graph. (2026). Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulses. Retrieved May 24, 2026, from https://4ort.xyz/entity/atomic-layer-deposition-of-iridium-thin-films-using-sequential-oxygen-and-hydrogen-pulses
MLA“Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulses.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/atomic-layer-deposition-of-iridium-thin-films-using-sequential-oxygen-and-hydrogen-pulses.
BibTeX@misc{4ortxyz_atomic-layer-deposition-of-iridium-thin-films-using-sequential-oxygen-and-hydrogen-pulses_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulses}}, year = {2026}, url = {https://4ort.xyz/entity/atomic-layer-deposition-of-iridium-thin-films-using-sequential-oxygen-and-hydrogen-pulses}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): Atomic Layer Deposition of Iridium Thin Films Using Sequential Oxygen and Hydrogen Pulses — https://4ort.xyz/entity/atomic-layer-deposition-of-iridium-thin-films-using-sequential-oxygen-and-hydrogen-pulses (retrieved 2026-05-24)
