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A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

Research article (Micromachines, 2019) · cited 42× · AI/ML
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A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

Summary

A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process is a scholarly article[1].

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  • A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process's instance of is recorded as scholarly article[2].

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

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  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-mems-micro-g-capacitive-accelerometer-based-on-through-silicon-wafer-etching-process
MLA “A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-mems-micro-g-capacitive-accelerometer-based-on-through-silicon-wafer-etching-process.
BibTeX @misc{4ortxyz_a-mems-micro-g-capacitive-accelerometer-based-on-through-silicon-wafer-etching-process_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process}}, year = {2026}, url = {https://4ort.xyz/entity/a-mems-micro-g-capacitive-accelerometer-based-on-through-silicon-wafer-etching-process}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process — https://4ort.xyz/entity/a-mems-micro-g-capacitive-accelerometer-based-on-through-silicon-wafer-etching-process (retrieved 2026-05-24)

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