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A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Research article (Journal of Micromechanics and Microengineering, 2016) · cited 29× · AI/ML
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A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

Summary

A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution is a scholarly article[1].

Key Facts

  • A MEMSXY-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution's instance of is recorded as scholarly article[2].

References

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Direct Wikidata claims

  1. [2] ↑ . wikidata.org.

Class ancestry

  1. [1] ↑ . Wikidata. wikidata.org.

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APA 4ort.xyz Knowledge Graph. (2026). A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution. Retrieved May 24, 2026, from https://4ort.xyz/entity/a-mems-i-xy-i-stage-integrating-compliant-mechanism-for-nanopositioning-at-sub-nanometer-resolution
MLA “A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/a-mems-i-xy-i-stage-integrating-compliant-mechanism-for-nanopositioning-at-sub-nanometer-resolution.
BibTeX @misc{4ortxyz_a-mems-i-xy-i-stage-integrating-compliant-mechanism-for-nanopositioning-at-sub-nanometer-resolution_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution}}, year = {2026}, url = {https://4ort.xyz/entity/a-mems-i-xy-i-stage-integrating-compliant-mechanism-for-nanopositioning-at-sub-nanometer-resolution}, note = {Accessed: 2026-05-24}}
LLM prompt According to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution — https://4ort.xyz/entity/a-mems-i-xy-i-stage-integrating-compliant-mechanism-for-nanopositioning-at-sub-nanometer-resolution (retrieved 2026-05-24)

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