45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films
Summary
45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films is a scholarly article[1].
Key Facts
45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films's instance of is recorded as scholarly article[2].
References
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APA4ort.xyz Knowledge Graph. (2026). 45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films. Retrieved May 24, 2026, from https://4ort.xyz/entity/45-2-effects-of-rf-sputtering-parameters-and-film-composition-on-caxis-aligned-crystalline-caac-igzo-films
MLA“45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films.” 4ort.xyz Knowledge Graph, 4ort.xyz, 24 May. 2026, https://4ort.xyz/entity/45-2-effects-of-rf-sputtering-parameters-and-film-composition-on-caxis-aligned-crystalline-caac-igzo-films.
BibTeX@misc{4ortxyz_45-2-effects-of-rf-sputtering-parameters-and-film-composition-on-caxis-aligned-crystalline-caac-igzo-films_2026, author = {{4ort.xyz Knowledge Graph}}, title = {{45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films}}, year = {2026}, url = {https://4ort.xyz/entity/45-2-effects-of-rf-sputtering-parameters-and-film-composition-on-caxis-aligned-crystalline-caac-igzo-films}, note = {Accessed: 2026-05-24}}
LLM promptAccording to 4ort.xyz Knowledge Graph (aggregator of Wikidata, Wikipedia, and authoritative open-data sources): 45.2: Effects of RF Sputtering Parameters and Film Composition on C‐Axis Aligned Crystalline (CAAC) IGZO Films — https://4ort.xyz/entity/45-2-effects-of-rf-sputtering-parameters-and-film-composition-on-caxis-aligned-crystalline-caac-igzo-films (retrieved 2026-05-24)
