# Yield Prediction with Machine Learning and Parameter Limits in Semiconductor Production

> Research article (2022 International Symposium on Semiconductor Manufacturing (ISSM), 2022) · cited 11× · AI/ML

**Wikidata**: [openalex:W4318953223](https://www.wikidata.org/wiki/openalex:W4318953223)  
**Source**: https://4ort.xyz/entity/yield-prediction-with-machine-learning-and-parameter-limits-in-semiconductor-production