# X‐ray microscopy and automatic detection of defects in through silicon vias in three‐dimensional integrated circuits

> Research article (Engineering Reports, 2022) · cited 16× · AI/ML

**Wikidata**: [openalex:W4280503200](https://www.wikidata.org/wiki/openalex:W4280503200)  
**Source**: https://4ort.xyz/entity/xray-microscopy-and-automatic-detection-of-defects-in-through-silicon-vias-in-threedimensional-integrated-circuits