# X-ray diffraction studies of residual strain in AlN/sapphire templates

> Research article (Measurement, 2022) · cited 11× · AI/ML

**Wikidata**: [openalex:W4285014052](https://www.wikidata.org/wiki/openalex:W4285014052)  
**Source**: https://4ort.xyz/entity/x-ray-diffraction-studies-of-residual-strain-in-aln-sapphire-templates