# Wafer Sojourn Time Fluctuation Analysis of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Variation

> Research article (IEEE Transactions on Systems Man and Cybernetics Systems, 2016) · cited 83× · AI/ML

**Wikidata**: [openalex:W2511769035](https://www.wikidata.org/wiki/openalex:W2511769035)  
**Source**: https://4ort.xyz/entity/wafer-sojourn-time-fluctuation-analysis-of-time-constrained-dual-arm-cluster-tools-with-wafer-revisiting-and-activity-ti