# Wafer Reflectance Prediction for Complex Etching Process Based on <i>K</i>-Means Clustering and Neural Network

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 17× · AI/ML

**Wikidata**: [openalex:W3145730345](https://www.wikidata.org/wiki/openalex:W3145730345)  
**Source**: https://4ort.xyz/entity/wafer-reflectance-prediction-for-complex-etching-process-based-on-i-k-i-means-clustering-and-neural-network