# Visual sensing based ultra-high precision motion control with compensated mechanical drift across different stages

> Research article (IEEE/ASME Transactions on Mechatronics, 2020) · cited 12× · AI/ML

**Wikidata**: [openalex:W3008271615](https://www.wikidata.org/wiki/openalex:W3008271615)  
**Source**: https://4ort.xyz/entity/visual-sensing-based-ultra-high-precision-motion-control-with-compensated-mechanical-drift-across-different-stages