# Virtual overlay metrology for fault detection supported with integrated metrology and machine learning

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2024086415](https://www.wikidata.org/wiki/openalex:W2024086415)  
**Source**: https://4ort.xyz/entity/virtual-overlay-metrology-for-fault-detection-supported-with-integrated-metrology-and-machine-learning