# Virtual metrology of semiconductor PVD process based on combination of tree-based ensemble model

> Research article (ISA Transactions, 2020) · cited 49× · AI/ML

**Wikidata**: [openalex:W3014303592](https://www.wikidata.org/wiki/openalex:W3014303592)  
**Source**: https://4ort.xyz/entity/virtual-metrology-of-semiconductor-pvd-process-based-on-combination-of-tree-based-ensemble-model