# Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks

> Research article (IEEE Access, 2022) · cited 31× · AI/ML

**Wikidata**: [openalex:W4287888680](https://www.wikidata.org/wiki/openalex:W4287888680)  
**Source**: https://4ort.xyz/entity/virtual-metrology-in-semiconductor-fabrication-foundry-using-deep-learning-neural-networks