# Virtual metrology for semiconductor manufacturing: Focus on transfer learning

> Research article (2021 IEEE 17th International Conference on Automation Science and Engineering (CASE), 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3203047944](https://www.wikidata.org/wiki/openalex:W3203047944)  
**Source**: https://4ort.xyz/entity/virtual-metrology-for-semiconductor-manufacturing-focus-on-transfer-learning