# Virtual Metrology for Etch Profile in Silicon Trench Etching With SF₆/O₂/Ar Plasma

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 26× · AI/ML

**Wikidata**: [openalex:W4205414130](https://www.wikidata.org/wiki/openalex:W4205414130)  
**Source**: https://4ort.xyz/entity/virtual-metrology-for-etch-profile-in-silicon-trench-etching-with-sf6-o2-ar-plasma