# Virtual Metrology applied in Run-to-Run Control for a Chemical Mechanical Planarization process

> Research article (Journal of Physics Conference Series, 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2577914922](https://www.wikidata.org/wiki/openalex:W2577914922)  
**Source**: https://4ort.xyz/entity/virtual-metrology-applied-in-run-to-run-control-for-a-chemical-mechanical-planarization-process