# Vibration Identification of Folded-MEMS Comb Drive Resonators

> Research article (Micromachines, 2018) · cited 10× · AI/ML

**Wikidata**: [openalex:W2886586608](https://www.wikidata.org/wiki/openalex:W2886586608)  
**Source**: https://4ort.xyz/entity/vibration-identification-of-folded-mems-comb-drive-resonators