# Vibration compensated high-resolution scanning white-light Linnik-interferometer

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 10× · AI/ML

**Wikidata**: [openalex:W2726658230](https://www.wikidata.org/wiki/openalex:W2726658230)  
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