# Vertical integration of capacitive and piezo-resistive sensing units to enlarge the sensing range of CMOS-MEMS tactile sensor

> Research article (2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017) · cited 21× · AI/ML

**Wikidata**: [openalex:W2591678458](https://www.wikidata.org/wiki/openalex:W2591678458)  
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