# UV Hyperspectral Imaging as Process Analytical Tool for the Characterization of Oxide Layers and Copper States on Direct Bonded Copper

> Research article (Sensors, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3208841491](https://www.wikidata.org/wiki/openalex:W3208841491)  
**Source**: https://4ort.xyz/entity/uv-hyperspectral-imaging-as-process-analytical-tool-for-the-characterization-of-oxide-layers-and-copper-states-on-direct