# Using machine learning in the physical modeling of lithographic processes

> Research article (Design-Process-Technology Co-optimization for Manufacturability XIII, 2019) · cited 12× · AI/ML

**Wikidata**: [openalex:W2934391393](https://www.wikidata.org/wiki/openalex:W2934391393)  
**Source**: https://4ort.xyz/entity/using-machine-learning-in-the-physical-modeling-of-lithographic-processes