# Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing

> Research article (Management Science, 2021) · cited 270× · AI/ML

**Wikidata**: [openalex:W4200224444](https://www.wikidata.org/wiki/openalex:W4200224444)  
**Source**: https://4ort.xyz/entity/using-explainable-artificial-intelligence-to-improve-process-quality-evidence-from-semiconductor-manufacturing