# Use of Plasma Information in Machine-Learning-Based Fault Detection and Classification for Advanced Equipment Control

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 30× · AI/ML

**Wikidata**: [openalex:W3161670441](https://www.wikidata.org/wiki/openalex:W3161670441)  
**Source**: https://4ort.xyz/entity/use-of-plasma-information-in-machine-learning-based-fault-detection-and-classification-for-advanced-equipment-control