# Use of Optical Emission Spectroscopy Data for Fault Detection of Mass Flow Controller in Plasma Etch Equipment

> Research article (Electronics, 2022) · cited 19× · AI/ML

**Wikidata**: [openalex:W4206555839](https://www.wikidata.org/wiki/openalex:W4206555839)  
**Source**: https://4ort.xyz/entity/use-of-optical-emission-spectroscopy-data-for-fault-detection-of-mass-flow-controller-in-plasma-etch-equipment