# Unsupervised machine learning based SEM image denoising for robust contour detection

> Research article (International Conference on Extreme Ultraviolet Lithography 2021, 2021) · cited 12× · AI/ML

**Wikidata**: [openalex:W3201864747](https://www.wikidata.org/wiki/openalex:W3201864747)  
**Source**: https://4ort.xyz/entity/unsupervised-machine-learning-based-sem-image-denoising-for-robust-contour-detection