# Understanding the efficacy of linewidth roughness postprocessing

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2015) · cited 14× · AI/ML

**Wikidata**: [openalex:W2181165553](https://www.wikidata.org/wiki/openalex:W2181165553)  
**Source**: https://4ort.xyz/entity/understanding-the-efficacy-of-linewidth-roughness-postprocessing