# Unbiased roughness measurements: Subtracting out SEM effects

> Research article (Microelectronic Engineering, 2018) · cited 49× · AI/ML

**Wikidata**: [openalex:W2782192392](https://www.wikidata.org/wiki/openalex:W2782192392)  
**Source**: https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects