# Unbiased roughness measurements: subtracting out SEM effects, part 3

> Research article (Metrology, Inspection, and Process Control for Microlithography XXXIII, 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2925144629](https://www.wikidata.org/wiki/openalex:W2925144629)  
**Source**: https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects-part-3