# Unbiased roughness measurements: Subtracting out SEM effects, part 2

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2018) · cited 12× · AI/ML

**Wikidata**: [openalex:W2900749596](https://www.wikidata.org/wiki/openalex:W2900749596)  
**Source**: https://4ort.xyz/entity/unbiased-roughness-measurements-subtracting-out-sem-effects-part-2