# Ultrahigh Resolution Titanium Deep Reactive Ion Etching

> Research article (ACS Applied Materials & Interfaces, 2017) · cited 11× · AI/ML

**Wikidata**: [openalex:W2617252561](https://www.wikidata.org/wiki/openalex:W2617252561)  
**Source**: https://4ort.xyz/entity/ultrahigh-resolution-titanium-deep-reactive-ion-etching