# Ultra-Thin Silicon based Piezoelectric Capacitive Tactile Sensor

> Research article (Procedia Engineering, 2016) · cited 17× · AI/ML

**Wikidata**: [openalex:W2571508694](https://www.wikidata.org/wiki/openalex:W2571508694)  
**Source**: https://4ort.xyz/entity/ultra-thin-silicon-based-piezoelectric-capacitive-tactile-sensor