# Ultra-Low kV EDS – A New Approach to Improved Spatial Resolution, Surface Sensitivity, and Light Element Compositional Imaging and Analysis in the SEM

> Research article (Microscopy Today, 2017) · cited 47× · AI/ML

**Wikidata**: [openalex:W2593872403](https://www.wikidata.org/wiki/openalex:W2593872403)  
**Source**: https://4ort.xyz/entity/ultra-low-kv-eds-a-new-approach-to-improved-spatial-resolution-surface-sensitivity-and-light-element-compositional-imagi