# Ultra-high vacuum dc magnetron sputter-deposition of 0001-textured trigonal α-Ta2C/Al2O3(0001) thin films

> Research article (Materialia, 2020) · cited 10× · AI/ML

**Wikidata**: [openalex:W3045251911](https://www.wikidata.org/wiki/openalex:W3045251911)  
**Source**: https://4ort.xyz/entity/ultra-high-vacuum-dc-magnetron-sputter-deposition-of-0001-textured-trigonal-ta2c-al2o3-0001-thin-films
