# Two-Stage Transfer Learning for Fault Prognosis of Ion Mill Etching Process

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 21× · AI/ML

**Wikidata**: [openalex:W3133468499](https://www.wikidata.org/wiki/openalex:W3133468499)  
**Source**: https://4ort.xyz/entity/two-stage-transfer-learning-for-fault-prognosis-of-ion-mill-etching-process