# Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filters

> Research article (2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015) · cited 10× · AI/ML

**Wikidata**: [openalex:W2089965791](https://www.wikidata.org/wiki/openalex:W2089965791)  
**Source**: https://4ort.xyz/entity/tunneling-piezoresistive-tactile-sensing-array-fabricated-by-a-novel-fabrication-process-with-membrane-filters