# Tuning the Performance of Negative Tone Electron Beam Resists for the Next Generation Lithography

> Research article (Advanced Functional Materials, 2022) · cited 40× · AI/ML

**Wikidata**: [openalex:W4281608291](https://www.wikidata.org/wiki/openalex:W4281608291)  
**Source**: https://4ort.xyz/entity/tuning-the-performance-of-negative-tone-electron-beam-resists-for-the-next-generation-lithography