# Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

> Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2017) · cited 47× · AI/ML

**Wikidata**: [openalex:W2772327546](https://www.wikidata.org/wiki/openalex:W2772327546)  
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