# Tunable ion flux density and its impact on AlN thin films deposited in a confocal DC magnetron sputtering system

> Research article (Surface and Coatings Technology, 2018) · cited 13× · AI/ML

**Wikidata**: [openalex:W2804881886](https://www.wikidata.org/wiki/openalex:W2804881886)  
**Source**: https://4ort.xyz/entity/tunable-ion-flux-density-and-its-impact-on-aln-thin-films-deposited-in-a-confocal-dc-magnetron-sputtering-system