# Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor.

> Research article (IFAC-PapersOnLine, 2017) · cited 10× · AI/ML

**Wikidata**: [openalex:W2765856203](https://www.wikidata.org/wiki/openalex:W2765856203)  
**Source**: https://4ort.xyz/entity/tracking-control-of-a-monolithic-piezoelectric-nanopositioning-stage-using-an-integrated-sensor