# Towards smart scanning probe lithography: a framework accelerating nano-fabrication process with in-situ characterization via machine learning

> Research article (Microsystems & Nanoengineering, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4387496766](https://www.wikidata.org/wiki/openalex:W4387496766)  
**Source**: https://4ort.xyz/entity/towards-smart-scanning-probe-lithography-a-framework-accelerating-nano-fabrication-process-with-in-situ-characterization