# Towards improving challenging stochastic defect detection in SEM images based on improved YOLOv5

> Research article (Photomask Technology 2022, 2022) · cited 13× · AI/ML

**Wikidata**: [openalex:W4308696870](https://www.wikidata.org/wiki/openalex:W4308696870)  
**Source**: https://4ort.xyz/entity/towards-improving-challenging-stochastic-defect-detection-in-sem-images-based-on-improved-yolov5