# Towards a high bias voltage MEMS filter using electrostatic levitation

> Research article (Mechanical Systems and Signal Processing, 2020) · cited 19× · AI/ML

**Wikidata**: [openalex:W3084086204](https://www.wikidata.org/wiki/openalex:W3084086204)  
**Source**: https://4ort.xyz/entity/towards-a-high-bias-voltage-mems-filter-using-electrostatic-levitation